Effect of Doping and Temperature Operating on (NO2 ) Gas Sensing Properties for MgxZnO1-x /n-Si Heterojunction
Keywords:
Gas sensing, NO2, , operating temperature, response and recovery time
Abstract
In this paper prepared ZnO/n-Si, and dopant Mg0.05ZnO0.95/n-Si films using a chemical spraying pyrolysis (CSP) technique. The grow doped solutions Mg0.05ZnO0.95 volumetric ratio (5)% from MgO and deposited on silicon substrates and at different temperatures (400,450,and 500)°C was installed thickness by installing a number of sprays. The thickness of all the films ranges between (80 ±5) nm, used as a gas holder nitrogen. The crystal structure was examined by using X-ray diffraction(XRD) technique. The results showed that all the prepared films polycrystalline, showing improvement in the crystal structure in terms of increasing the intensity of the peaks, by change of temperature. As studied the topography of the surface of the films prepared using field emission scanning electron microscopy (FESEM), and energy dispersive X-ray (EDX), and atomic force microscope (AFM), granular size for the ZnO depends on the ratio of Mg-content volumetric, where decreases grain size with adding Mg-content. As well as that add MgO in the films lead to a decrease in surface roughness. Also, (EDX) showed films contain elements (Si, N, O, Zn, and Mg) as expected. The sensitivity of the prepared films to (NO2) gas in air ambient has been measured in the gas sensing system. All samples were tested at a ratio (3% NO2:air) and bias voltage (6Volt). The best ratio dopant of the Mg-content is (5)% , best operating temperature is (200)oC, and best temperature of the silicon substrate is (400)°C. The maximum sensitivity is (90.80)% and fast response time is((6.3s) and recovery time is (44.1s).Downloads
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References
[1] Wang, S. H. , Chou, T. C., Liu, C. C., "Nano-crystalline tungsten oxide NO2 sensor", Sensors and Actuators B, Vol. 94, pp.(343-351), (2003).
[2] Schuisk y, M., Elam, J. W., and Georg, S. M., "In situ resistivity measurements during the atomic layer deposition of ZnO and W thin films", App. Phys. Let., Vol. 81, pp.(180-183), (2002).
[3] Diamond, D. editor., "Principles of chemical and biological sensors" ,volume of chemical analysis. John Wiley and Sons, Inc.,Vol.150, (1998).
[4] Kersen, Ç—.,"Gas sensing properties of nanocrystalline metal oxide powder produced by thermal deposition and mechanochemical processing", dissertation of Ph.D. , Helsinki University of Technology, department of electrical and communication engineering, (2003).
[5] Ginley, D., Hosono, H., and Paine, D., (editors): Handbook of Transparent Conductors Springer, New York, ( 2010).
[6] Freeman, A. J. , Poeppelmeier, K.R., Mason, T.O., Chang, R.P.H., and Marks, T.J., "Chemical and thin-film strategies for new transparent conducting oxides", MRS Bulletin, Vol. 25, pp.(45-51), (2000).
[7] Robertson, J., and Falabretti, B., "Electronic structure of transparent conducting oxides", in Handbook of transparent conductors, edited by D. Ginley, H. Hosono and D. Paine Springer, New York, pp. (27-50) , (2010) .
[8] Muratore, C., Moore, J. J. , and Rees, J.A., "Electrostatic quadruple plasma mass pectrometer and Langmuir probe measurements of mid-frequency pulsed DC magnetron discharges", Surface and Coatings Technology, Vol.12, p.163 , (2003).
[9] Patil, G. E., Kajale, D. D. , Chavan, D. N., Pawar, N. K. , Ahire, P. T. , Shinde, S. D., Gaikwad, V.B., and Jain, G. H., "Synthesis characterization and gas sensing performance of SnO2 thin films prepared by spray pyrolysis ", Bull. Mater. Sci., Vol.34, pp.(1-9), (2011).
[10] Kim, S. J., Lee, S. H., and Lee, C. J., "Organic vapour sensing by current response of porous silicon layer", J. Phys. D: Appl. Phys., Vol.34, pp.(3505-3509), (2001).
[11] Wegrzyn, S., Klamka, J., Znamirowski, L., Winiarczyk, R., and Nowak, S., "Nano and quantum systems of informatics", Bulletin of the polish academy of science technical sciences, Vol.52, pp.(1-10), (2004).
[12] Lee Comstock, J., "Elements of chemistry", edition: 26 published by Robinson, Pratt, and Co.,1838 original from Harvard University digitized, p.356, (2008).
[13] Marco, S., Cornet, A., Morante, J. R., Castano, E., Jane, R., Jimenez, S., Pardo, A., Ortega, A., and Cirera, "Smart multi sensor integrating methane and carbon monoxide gas detection with improved selectivity by signal processing", Proceedings, San Diego, p.98 , (1998).
[14] Williams, D. E. , "Semiconductor oxides as gas- sensitive resistors", Sensors and Actuators B,Vol.57, pp.(1-16) ,(1999).
[15] Al-Hardan, N. H. , Abdullah, M. J., Abdul Aziz, A., "Sensing mechanism of hydrogen gas sensor based on RF - sputtered ZnO thin films", International journal of hydrogen energy ,Vol.35, pp.(4428 - 4434), (2010).
[16] Sujitno, T., and Sudjatmoko, "The characteristics of SnO2 thin films for Gas sensor application", Center for Research and Development of Advanced Technology National Nuclear Energy Agency, (2010).
[17] Abhijith N., " Semiconducting metal oxide gas sensors": development and related instrumentation, M.Sc. Thesis, Indian Institute of Science, Bangalore, India, (2006).
[2] Schuisk y, M., Elam, J. W., and Georg, S. M., "In situ resistivity measurements during the atomic layer deposition of ZnO and W thin films", App. Phys. Let., Vol. 81, pp.(180-183), (2002).
[3] Diamond, D. editor., "Principles of chemical and biological sensors" ,volume of chemical analysis. John Wiley and Sons, Inc.,Vol.150, (1998).
[4] Kersen, Ç—.,"Gas sensing properties of nanocrystalline metal oxide powder produced by thermal deposition and mechanochemical processing", dissertation of Ph.D. , Helsinki University of Technology, department of electrical and communication engineering, (2003).
[5] Ginley, D., Hosono, H., and Paine, D., (editors): Handbook of Transparent Conductors Springer, New York, ( 2010).
[6] Freeman, A. J. , Poeppelmeier, K.R., Mason, T.O., Chang, R.P.H., and Marks, T.J., "Chemical and thin-film strategies for new transparent conducting oxides", MRS Bulletin, Vol. 25, pp.(45-51), (2000).
[7] Robertson, J., and Falabretti, B., "Electronic structure of transparent conducting oxides", in Handbook of transparent conductors, edited by D. Ginley, H. Hosono and D. Paine Springer, New York, pp. (27-50) , (2010) .
[8] Muratore, C., Moore, J. J. , and Rees, J.A., "Electrostatic quadruple plasma mass pectrometer and Langmuir probe measurements of mid-frequency pulsed DC magnetron discharges", Surface and Coatings Technology, Vol.12, p.163 , (2003).
[9] Patil, G. E., Kajale, D. D. , Chavan, D. N., Pawar, N. K. , Ahire, P. T. , Shinde, S. D., Gaikwad, V.B., and Jain, G. H., "Synthesis characterization and gas sensing performance of SnO2 thin films prepared by spray pyrolysis ", Bull. Mater. Sci., Vol.34, pp.(1-9), (2011).
[10] Kim, S. J., Lee, S. H., and Lee, C. J., "Organic vapour sensing by current response of porous silicon layer", J. Phys. D: Appl. Phys., Vol.34, pp.(3505-3509), (2001).
[11] Wegrzyn, S., Klamka, J., Znamirowski, L., Winiarczyk, R., and Nowak, S., "Nano and quantum systems of informatics", Bulletin of the polish academy of science technical sciences, Vol.52, pp.(1-10), (2004).
[12] Lee Comstock, J., "Elements of chemistry", edition: 26 published by Robinson, Pratt, and Co.,1838 original from Harvard University digitized, p.356, (2008).
[13] Marco, S., Cornet, A., Morante, J. R., Castano, E., Jane, R., Jimenez, S., Pardo, A., Ortega, A., and Cirera, "Smart multi sensor integrating methane and carbon monoxide gas detection with improved selectivity by signal processing", Proceedings, San Diego, p.98 , (1998).
[14] Williams, D. E. , "Semiconductor oxides as gas- sensitive resistors", Sensors and Actuators B,Vol.57, pp.(1-16) ,(1999).
[15] Al-Hardan, N. H. , Abdullah, M. J., Abdul Aziz, A., "Sensing mechanism of hydrogen gas sensor based on RF - sputtered ZnO thin films", International journal of hydrogen energy ,Vol.35, pp.(4428 - 4434), (2010).
[16] Sujitno, T., and Sudjatmoko, "The characteristics of SnO2 thin films for Gas sensor application", Center for Research and Development of Advanced Technology National Nuclear Energy Agency, (2010).
[17] Abhijith N., " Semiconducting metal oxide gas sensors": development and related instrumentation, M.Sc. Thesis, Indian Institute of Science, Bangalore, India, (2006).
Published
2018-01-20
How to Cite
O. Abdulazeez, M., & H. Trier, S. (2018). Effect of Doping and Temperature Operating on (NO2 ) Gas Sensing Properties for MgxZnO1-x /n-Si Heterojunction. Al-Qadisiyah Journal of Pure Science, 22(2), 87-95. Retrieved from https://journalsc.qu.edu.iq/index.php/JOPS/article/view/591
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